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Prof. A. Karoui
Nanoscience
and Nanotechnology Research Center,
Shaw University, Raleigh, NC
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Amongst who dream of clean
and accessible energy |
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a) HR TEM micrograph of a precipitate located
on the surface of annealed N doped silicon sample
b) FFT image of the same precipitate. arrow
indicates principal reflections, corresponding to unusual epitaxial
relationship [011]Si || [001]precipitate and
[111]Si || [0201]precipitate |
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a) HR TEM image of an amorphous SiOxNy
precipitate
b) FFT spectrum of the same image showing
{111} facets. |
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Side view of a Precipitate platelet
in Nitrogen doped CZ silicon |
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Calculated IR
Spectra of interstitial nitrogen pair in silicon |
Nanoindentation |
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Development of ultra-low impurity level
decontamination RTP tool for a 0.13 micron microelectronic silicon
technology.
Temperature dependent linescan of minority
carrier recombination lifetime in contaminated silicon wafer with an
OSF ring structure.
Both
Fe-B and Fei concentrations are lowered to below 1010
cm-3
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RTP guts, lifetime profile,...
SiWEDS
Presentation on RTP induced defects in silicon wafers |
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Room 309, Robert Science Building
Shaw University,
118 East SouthSt., Raleigh, N.C. 27601, U.S.A.
Phone: 919-719 1998, 274 9411
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